JPH0146001B2 - - Google Patents

Info

Publication number
JPH0146001B2
JPH0146001B2 JP57201488A JP20148882A JPH0146001B2 JP H0146001 B2 JPH0146001 B2 JP H0146001B2 JP 57201488 A JP57201488 A JP 57201488A JP 20148882 A JP20148882 A JP 20148882A JP H0146001 B2 JPH0146001 B2 JP H0146001B2
Authority
JP
Japan
Prior art keywords
detected
slit
signal
detection
slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57201488A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5991304A (ja
Inventor
Kenichi Matsumura
Norio Okuya
Toshitoki Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20148882A priority Critical patent/JPS5991304A/ja
Publication of JPS5991304A publication Critical patent/JPS5991304A/ja
Publication of JPH0146001B2 publication Critical patent/JPH0146001B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP20148882A 1982-11-16 1982-11-16 位置検出装置 Granted JPS5991304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20148882A JPS5991304A (ja) 1982-11-16 1982-11-16 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20148882A JPS5991304A (ja) 1982-11-16 1982-11-16 位置検出装置

Publications (2)

Publication Number Publication Date
JPS5991304A JPS5991304A (ja) 1984-05-26
JPH0146001B2 true JPH0146001B2 (en]) 1989-10-05

Family

ID=16441886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20148882A Granted JPS5991304A (ja) 1982-11-16 1982-11-16 位置検出装置

Country Status (1)

Country Link
JP (1) JPS5991304A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525602B2 (en]) * 1973-05-10 1980-07-07

Also Published As

Publication number Publication date
JPS5991304A (ja) 1984-05-26

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